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PeCVD Coaters


PfC RF 400 DLC

PfC PeCVD 400 DLC 2M

PfC PeCVD 650 DLC 4M
TechnologyPeCVD by RF 13.56MHzHybrid PVD/PeCVDHybrid PVD/PeCVD
Useful Size400 x 400 mm400 x 500 mm
2 Magnetrons
600 x 700 mm
2 or 4 Magnetrons
Cycle Time2 μm: 3 h2,5 μm: 3-5 h2,5 μm: 3-5 h
CoatingsDLC (C,H,Si)
DLC +F
DLC+N
SiC, SiC+DLC, SiOX
Cr/DLC
Cr/CrN/DLC
WC/C
Cr/CrN/WC/C
Cr/DLC
Cr/CrN/DLC
WC/C
Cr/CrN/WC/C
PropertiesLow friction,
high density,
high compressive stress
Metal DLC coating,
low friction,
wear resistance
Metal DLC coating,
low friction,
wear resistance
ApplicationsComponents for:
racing, medical, decorative,
plastic molds
Components for:
automotive, aircraft,
hydraulic, textile, plastic
molds, tooling
Components for:
automotive, aircraft,
hydraulic, textile, plastic
molds, tooling
OptionsPulsed DLCEquipment for non-conductive
materials + DLC
Equipment for non-conductive
materials + DLC

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