PeCVD Coaters

	PfC RF 400 DLC	PfC PeCVD 400 DLC 2M	PfC PeCVD 650 DLC 4M
Technology	PeCVD by RF 13.56MHz	Hybrid PVD/PeCVD	Hybrid PVD/PeCVD
Useful Size	400 x 400 mm	400 x 500 mm 2 Magnetrons	600 x 700 mm 2 or 4 Magnetrons
Cycle Time	2 μm: 3 h	2,5 μm: 3-5 h	2,5 μm: 3-5 h
Coatings	DLC (C,H,Si) DLC +F DLC+N SiC, SiC+DLC, SiOX	Cr/DLC Cr/CrN/DLC WC/C Cr/CrN/WC/C	Cr/DLC Cr/CrN/DLC WC/C Cr/CrN/WC/C
Properties	Low friction, high density, high compressive stress	Metal DLC coating, low friction, wear resistance	Metal DLC coating, low friction, wear resistance
Applications	Components for: racing, medical, decorative, plastic molds	Components for: automotive, aircraft, hydraulic, textile, plastic molds, tooling	Components for: automotive, aircraft, hydraulic, textile, plastic molds, tooling
Options	Pulsed DLC	Equipment for non-conductive materials + DLC	Equipment for non-conductive materials + DLC

PerformCoat