PeCVD Coaters


PfC RF 400 DLC

PfC 400 DLC 2M

PfC 600 DLC 4M
TechnologyPeCVD by RF 13,56MHzHybrid PVD/PeCVDHybrid PVD/PeCVD
Useful Size400 x 400 mm400 x 500 mm600 x 700 mm
Cycle Time2μm : 3 hrs2,5 μm 3 to 5 hrs2,5 μm 3 to 5 hrs
CoatingsDLC (C,H,Si)
DLC +F
DLC+N
SiC, SiC+DLC, SiOX
Cr/DLC
Cr/CrN/DLC
WC/C
Cr/CrN/WC/C
Cr/DLC
Cr/CrN/DLC
WC/C
Cr/CrN/WC/C
PropertiesLow friction,
high density,
high compressive stress
Metal DLC coating,
low friction,
wear resistance
Metal DLC coating,
low friction,
wear resistance
ApplicationsRacing, medical,
decorative,
plastics molds
Components for :
automotive, aircraft,
hydraulic, textile, plastics
molds, tooling
Components for :
automotive, aircraft,
hydraulic, textile, plastics
molds, tooling
OptionsPulsed DLCEquipment for non-conductive materials
+ DLC
Equipment for non-conductive materials
+ DLC

PerformCoat Equipment Portfolio