PeCVD Coaters

	PfC RF 400 DLC	PfC 400 DLC 2M	PfC 600 DLC 4M
Technology	PeCVD by RF 13,56MHz	Hybrid PVD/PeCVD	Hybrid PVD/PeCVD
Useful Size	400 x 400 mm	400 x 500 mm	600 x 700 mm
Cycle Time	2μm : 3 hrs	2,5 μm 3 to 5 hrs	2,5 μm 3 to 5 hrs
Coatings	DLC (C,H,Si) DLC +F DLC+N SiC, SiC+DLC, SiOX	Cr/DLC Cr/CrN/DLC WC/C Cr/CrN/WC/C	Cr/DLC Cr/CrN/DLC WC/C Cr/CrN/WC/C
Properties	Low friction, high density, high compressive stress	Metal DLC coating, low friction, wear resistance	Metal DLC coating, low friction, wear resistance
Applications	Racing, medical, decorative, plastics molds	Components for : automotive, aircraft, hydraulic, textile, plastics molds, tooling	Components for : automotive, aircraft, hydraulic, textile, plastics molds, tooling
Options	Pulsed DLC	Equipment for non-conductive materials + DLC	Equipment for non-conductive materials + DLC

PerformCoat