PeCVD Coaters
 PfC RF 400 DLC |  PfC 400 DLC 2M |  PfC 600 DLC 4M |
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| Technology | PeCVD by RF 13,56MHz | Hybrid PVD/PeCVD | Hybrid PVD/PeCVD |
| Useful Size | 400 x 400 mm | 400 x 500 mm | 600 x 700 mm |
| Cycle Time | 2μm : 3 hrs | 2,5 μm 3 to 5 hrs | 2,5 μm 3 to 5 hrs |
| Coatings | DLC (C,H,Si) DLC +F DLC+N SiC, SiC+DLC, SiOX | Cr/DLC Cr/CrN/DLC WC/C Cr/CrN/WC/C | Cr/DLC Cr/CrN/DLC WC/C Cr/CrN/WC/C |
| Properties | Low friction, high density, high compressive stress | Metal DLC coating, low friction, wear resistance | Metal DLC coating, low friction, wear resistance |
| Applications | Racing, medical, decorative, plastics molds | Components for : automotive, aircraft, hydraulic, textile, plastics molds, tooling | Components for : automotive, aircraft, hydraulic, textile, plastics molds, tooling |
| Options | Pulsed DLC | Equipment for non-conductive materials + DLC | Equipment for non-conductive materials + DLC |
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